IIT Mandi

IIT Mandi To Organize A Summer School On Advanced Lithography And Device Fabrication

It will provide a platform for an in-depth discussion on current technologies, tools, strategies & various challenges as well as their possible remedies that will benefit young minds from academic and R&D institutions

Indian Institute of Technology Mandi is organizing a first-of-its-kind an eight-day long, ‘Summer School on Advanced Lithography and Device Fabrication: From basics to contemporary methods.’ The course is being offered from June 25 to July 02, 2019.


Designed especially for students and Faculty from Engineering institutes / Colleges and practitioners from Industries and R&D institutions, the objective of this eight-day school is to enhance the knowledge of participants in the area of advanced lithography and device fabrication, particularly how lithography technique is used for fabrication of semiconductor devices.

About The Course

Speaking about the importance of this course, Dr. Subrata Ghosh, Course Coordinator, and Associate Professor, School of Basic Sciences, IIT Mandi, said, “This summer school is going to be unique in many aspects. It will focus more on practical demonstration including lithography patterning and device fabrication. In addition to exposure to sophisticated instrumental tools, the participants will get the opportunity to do hand-on inside the cleanroom of IIT Mandi. The organizing team includes Prof Kenneth E Gonsalves (mentor), Dr. Satinder K Sharma and Dr. Pradeep Parameswaran (co-convenors)”.

The Major Topics Of Discussion In This School Will Be:

  • Photoresists technology: Design, processing and technology
  • Lithography processes and tools
  • Devices: Fabrication of ICs and VLSI Design principle

Photoresists are the key materials for lithography applications, this school will help participants in getting first-hand knowledge of the resists technology and the current trend.

The Subject Experts Delivering Lectures And Giving Demonstrations In This School Are:

Dr. Ananth Venkatesan, IISER Mohali

Dr. Mahadeva Bhat K., GAETEC Hyderabad

Er. Arpit Saraswat, SCL Mohali

Prof. Kenneth E Gonsalves, IIT Mandi

Dr. Hitesh Shrimali, IIT Mandi

Dr. Satinder Sharma, IIT Mandi

Dr. Prashant Verma, SAC Ahmedabad

Dr. Chandra Shekhar Sharma, IIT Hyderabad

Mr. Manoj Wadhwa, SCL Mohali, Group Head VMFG (FAB Line)

Er. Siva Penmetsa, Technology Manager, CeNSE, IISC Bangalore

Er. Chiranjeevi Lakavath, STAR-C, Bangalore

Er. Yatish Pandey, STAR-C, Bangalore

How Will The Experience Be?

The Summer School on Advanced Lithography and Device Fabrication aim to provide a platform not only for listening to lectures but to ensure intense interaction with the experts.

All the participants will be provided hands-on training on basic lithography technology and device fabrication. The participants will be given exposure to many state-of-the-art instrumental techniques and demonstrations/hands-on training.

Primarily these demonstrations include:

  • 1 – 2 hours demonstration on imaging using Field-Emission Scanning Microscope (FESEM) and Helium-ion Beam Lithography (HIBL)
  • Demonstration on X-ray photoelectron spectroscopy (XPS)
  • Demonstration on thin film formation using spin-coater and characterization
  • Demonstration on optical lithography (both 365nm &248 nm)
  • Demonstration on electron beam lithography (EBL)
  • Demonstration of 100 cleanroom facility

This summer school will provide a platform for an in-depth discussion on the current technologies, tools, strategies and various challenges as well as their possible remedies which will benefit young minds from academic and R&D institutions.

All the participants will get an opportunity to interact with the speakers/instructors closely. Various discussions on, ‘How the advancement in the area of Advanced Lithography will meet the national strategic needs as well as improve country’s economy with the creation of many jobs’, will also take place during this course.

About Summer School On Advanced Lithography and Device Fabrication

Summer School on Advanced Lithography and Device Fabrication is a unique program, with respect to the technical discussions with hands-on training on resists technology and its application for device fabrication. This school is a part of an ongoing project on, ‘Indigenous resists technology’ funded jointly by Ministry of Human Resource Development (MHRD), Department of Science and Technology (DST) and Semi-Conductor Laboratory (SCL),Mohali under the Uchhatar Avishkar Yojana (UAY) scheme – an initiative under the ‘Make-in-India’ program.

(Source – India Today)

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